6-axis force sensor is a kind of equipment used to ensure the application accuracy of robot. The sensor is specially designed for robot joints, and is usually installed on the wrist of a manipulator, providing accurate force measurement for all three geometric coordinates (Fx, Fy, Fz) and their surrounding moments or torques (Mx, My, Mz). Force/torque sensors are used in product testing, robot assembly, grinding, polishing and other industrial applications. In these applications, it is necessary to maintain stable position and high repeatability of trajectory.